JPH01110231U - - Google Patents
Info
- Publication number
- JPH01110231U JPH01110231U JP616788U JP616788U JPH01110231U JP H01110231 U JPH01110231 U JP H01110231U JP 616788 U JP616788 U JP 616788U JP 616788 U JP616788 U JP 616788U JP H01110231 U JPH01110231 U JP H01110231U
- Authority
- JP
- Japan
- Prior art keywords
- resistant
- furnace gas
- inner cylinder
- discharge pipe
- gas discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616788U JPH01110231U (en]) | 1988-01-21 | 1988-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616788U JPH01110231U (en]) | 1988-01-21 | 1988-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110231U true JPH01110231U (en]) | 1989-07-25 |
Family
ID=31210170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP616788U Pending JPH01110231U (en]) | 1988-01-21 | 1988-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110231U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009126774A (ja) * | 2007-11-28 | 2009-06-11 | Mitsubishi Materials Corp | 多結晶シリコンの製造装置 |
-
1988
- 1988-01-21 JP JP616788U patent/JPH01110231U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009126774A (ja) * | 2007-11-28 | 2009-06-11 | Mitsubishi Materials Corp | 多結晶シリコンの製造装置 |
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